Shodhganga : a reservoir of Indian theses @ INFLIBNET
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Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/92988
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.coverage.spatial | Physics | |
| dc.date.accessioned | 2016-05-31T06:32:23Z | - |
| dc.date.available | 2016-05-31T06:32:23Z | - |
| dc.identifier.uri | http://hdl.handle.net/10603/92988 | - |
| dc.description.abstract | Abstract available newline newline | |
| dc.format.extent | Xvi, 110p. | |
| dc.language | English | |
| dc.relation | No. of references 105 | |
| dc.rights | university | |
| dc.title | Simulation of energetic electron beam interaction with resist on semiconductor substrates using Monte Carlo process and its application to e_beam lithography | |
| dc.title.alternative | - | |
| dc.creator.researcher | Singh, Moirangthem Shubhakanta | |
| dc.subject.keyword | Electron-Solid Interactions, Elastic Scattering, Monte Carlo Method, Lithographic Strategies, X-Ray Lithography | |
| dc.description.note | Bibliography p. 107-110 | |
| dc.contributor.guide | Indrajit Sharma, B and Khatri, R K | |
| dc.publisher.place | Silchar | |
| dc.publisher.university | Assam University | |
| dc.publisher.institution | Department of Physics | |
| dc.date.registered | n.d. | |
| dc.date.completed | 2010 | |
| dc.date.awarded | n.d. | |
| dc.format.dimensions | - | |
| dc.format.accompanyingmaterial | None | |
| dc.source.university | University | |
| dc.type.degree | Ph.D. | |
| Appears in Departments: | Department of Physics | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title.pdf | Attached File | 304.76 kB | Adobe PDF | View/Open |
| 02_declaration.pdf | 32.7 kB | Adobe PDF | View/Open | |
| 03_certificate.pdf | 59.28 kB | Adobe PDF | View/Open | |
| 04_acknowledgement.pdf | 88.7 kB | Adobe PDF | View/Open | |
| 05_contents.pdf | 72.38 kB | Adobe PDF | View/Open | |
| 06_list of figures and tables.pdf | 175.34 kB | Adobe PDF | View/Open | |
| 07_abstract.pdf | 179.72 kB | Adobe PDF | View/Open | |
| 08_chapter 1.pdf | 830.83 kB | Adobe PDF | View/Open | |
| 09_chapter 2.pdf | 691.43 kB | Adobe PDF | View/Open | |
| 10_chapter 3.pdf | 366.62 kB | Adobe PDF | View/Open | |
| 11_chapter 4.pdf | 255.3 kB | Adobe PDF | View/Open | |
| 12_chapter 5.pdf | 1.02 MB | Adobe PDF | View/Open | |
| 13_chapter 6.pdf | 1.18 MB | Adobe PDF | View/Open | |
| 14_research publications.pdf | 24.79 kB | Adobe PDF | View/Open | |
| 15_references.pdf | 176.75 kB | Adobe PDF | View/Open |
Items in Shodhganga are licensed under Creative Commons Licence Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0).
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