1. Shodhganga@INFLIBNET
  2. Panjab University
  3. Faculty of Science
Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/88163
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DC FieldValueLanguage
dc.coverage.spatialScience
dc.date.accessioned2016-05-04T12:26:56Z-
dc.date.available2016-05-04T12:26:56Z-
dc.identifier.urihttp://hdl.handle.net/10603/88163-
dc.description.abstractAbstract available
dc.format.extentxvi, 71p.
dc.languageEnglish
dc.relation53-68
dc.rightsuniversity
dc.titleApproach to submicron pattern replication by an improved x ray source
dc.title.alternative
dc.creator.researcherDhar, Rakesh
dc.subject.keywordSubmicron
dc.subject.keywordReplication
dc.subject.keywordImproved
dc.subject.keywordLithography
dc.subject.keywordElectron
dc.description.noteData not available
dc.contributor.guideSingh, Nirmal
dc.publisher.placeChandigarh
dc.publisher.universityPanjab University
dc.publisher.institutionFaculty of Science
dc.date.registeredn.d.
dc.date.completed31/05/1992
dc.date.awardedn.d.
dc.format.dimensions69cm.
dc.format.accompanyingmaterialNone
dc.source.universityUniversity
dc.type.degreePh.D.
Appears in Departments:Faculty of Science

Files in This Item:
File Description SizeFormat 
01_title page.pdfAttached File42.22 kBAdobe PDFView/Open
02_dedication.pdf14.6 kBAdobe PDFView/Open
03_acknowledgement.pdf182.92 kBAdobe PDFView/Open
04_content.pdf80.74 kBAdobe PDFView/Open
05_figure captions.pdf155 kBAdobe PDFView/Open
06_abstract.pdf219.44 kBAdobe PDFView/Open
07_chapter 1.pdf654.88 kBAdobe PDFView/Open
08_chapter 2.pdf1.36 MBAdobe PDFView/Open
09_chapter 3.pdf1 MBAdobe PDFView/Open
10_chapter 4.pdf8.18 MBAdobe PDFView/Open
11_results and discussion.pdf6.79 MBAdobe PDFView/Open
12_references.pdf900.63 kBAdobe PDFView/Open
13_tables.pdf100.11 kBAdobe PDFView/Open
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