Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/88163
| Title: | Approach to submicron pattern replication by an improved x ray source |
| Researcher: | Dhar, Rakesh |
| Guide(s): | Singh, Nirmal |
| Keywords: | Submicron Replication Improved Lithography Electron |
| University: | Panjab University |
| Completed Date: | 31/05/1992 |
| Abstract: | Abstract available |
| Pagination: | xvi, 71p. |
| URI: | http://hdl.handle.net/10603/88163 |
| Appears in Departments: | Faculty of Science |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title page.pdf | Attached File | 42.22 kB | Adobe PDF | View/Open |
| 02_dedication.pdf | 14.6 kB | Adobe PDF | View/Open | |
| 03_acknowledgement.pdf | 182.92 kB | Adobe PDF | View/Open | |
| 04_content.pdf | 80.74 kB | Adobe PDF | View/Open | |
| 05_figure captions.pdf | 155 kB | Adobe PDF | View/Open | |
| 06_abstract.pdf | 219.44 kB | Adobe PDF | View/Open | |
| 07_chapter 1.pdf | 654.88 kB | Adobe PDF | View/Open | |
| 08_chapter 2.pdf | 1.36 MB | Adobe PDF | View/Open | |
| 09_chapter 3.pdf | 1 MB | Adobe PDF | View/Open | |
| 10_chapter 4.pdf | 8.18 MB | Adobe PDF | View/Open | |
| 11_results and discussion.pdf | 6.79 MB | Adobe PDF | View/Open | |
| 12_references.pdf | 900.63 kB | Adobe PDF | View/Open | |
| 13_tables.pdf | 100.11 kB | Adobe PDF | View/Open |
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