Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/82951
| Title: | ECR based plasma assisted chemical etching of semiconductors |
| Researcher: | Bhardwaj, Ram Krishan |
| Guide(s): | Bharadwaj, Lalit M |
| Keywords: | Cyclotron Electron Etching Plasma Semiconductors |
| University: | Panjab University |
| Completed Date: | 31/12/2006 |
| Abstract: | Abstract available |
| Pagination: | ix, 90p. |
| URI: | http://hdl.handle.net/10603/82951 |
| Appears in Departments: | Department of Physics |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title page.pdf | Attached File | 39.38 kB | Adobe PDF | View/Open |
| 02_dedication.pdf | 21.25 kB | Adobe PDF | View/Open | |
| 03_acknowledgement.pdf | 113.83 kB | Adobe PDF | View/Open | |
| 04_content.pdf | 108.41 kB | Adobe PDF | View/Open | |
| 05_abstract.pdf | 163.52 kB | Adobe PDF | View/Open | |
| 06_chapter 1.pdf | 1.12 MB | Adobe PDF | View/Open | |
| 07_chapter 2.pdf | 1.91 MB | Adobe PDF | View/Open | |
| 08_chapter 3.pdf | 1.68 MB | Adobe PDF | View/Open | |
| 09_chapter 4.pdf | 1.1 MB | Adobe PDF | View/Open | |
| 10_conclusion.pdf | 182.25 kB | Adobe PDF | View/Open | |
| 11_list of figures.pdf | 121.22 kB | Adobe PDF | View/Open | |
| 12_publication.pdf | 84.06 kB | Adobe PDF | View/Open |
Items in Shodhganga are licensed under Creative Commons Licence Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0).
Altmetric Badge: