Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/77385
Title: | Investigations on the structural and optical properties of NbOx ZrOx and ZrO1 xNx thin films prepared by reactive DC magnetron sputtering process |
Researcher: | Venkataraj, S |
Guide(s): | Jayavel, R |
Keywords: | Characterization Zirconium Oxynitride Sputtering Ellipsometry |
University: | Anna University |
Completed Date: | 31/05/2002 |
Abstract: | Abstract available |
Pagination: | xxiv, 203p. |
URI: | http://hdl.handle.net/10603/77385 |
Appears in Departments: | Faculty of Science and Humanities |
Files in This Item:
File | Description | Size | Format | |
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01_title page.pdf | Attached File | 21.8 kB | Adobe PDF | View/Open |
02_certificate.pdf | 23.19 kB | Adobe PDF | View/Open | |
03_abstract.pdf | 234.54 kB | Adobe PDF | View/Open | |
04_acknowledgement.pdf | 45.94 kB | Adobe PDF | View/Open | |
05_content.pdf | 38.6 kB | Adobe PDF | View/Open | |
06_list of tables.pdf | 54.92 kB | Adobe PDF | View/Open | |
07_list of figures.pdf | 291.35 kB | Adobe PDF | View/Open | |
08_list of symbols abbreviations and nomenclatures.pdf | 30.41 kB | Adobe PDF | View/Open | |
09_chapter 1.pdf | 469.74 kB | Adobe PDF | View/Open | |
10_chapter 2.pdf | 1.2 MB | Adobe PDF | View/Open | |
11_chapter 3.pdf | 2.08 MB | Adobe PDF | View/Open | |
12_chapter 4.pdf | 2.7 MB | Adobe PDF | View/Open | |
13_chapter 5.pdf | 2.12 MB | Adobe PDF | View/Open | |
14_chapter 6.pdf | 849.28 kB | Adobe PDF | View/Open | |
15_summary and suggestions for future work.pdf | 314.28 kB | Adobe PDF | View/Open | |
16_references.pdf | 587.87 kB | Adobe PDF | View/Open | |
17_list of publications.pdf | 37.28 kB | Adobe PDF | View/Open | |
18_vitae.pdf | 35.9 kB | Adobe PDF | View/Open |
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