Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/604356
Title: Some aspects of silicon micro matching technology for MEMS application
Researcher: Janak Singh
Guide(s): Chandra, Sudhir
Keywords: Engineering
Engineering and Technology
Engineering Electrical and Electronic
University: Indian Institute of Technology Delhi
Completed Date: 1997
Abstract: Abstract Available
Pagination: NA
URI: http://hdl.handle.net/10603/604356
Appears in Departments:Centre for Applied Research in Electronics

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01_title.pdfAttached File11.14 kBAdobe PDFView/Open
02_prelim pages.pdf112.99 kBAdobe PDFView/Open
03_content.pdf34.37 kBAdobe PDFView/Open
04_abstract.pdf27.34 kBAdobe PDFView/Open
05_chapter 1.pdf175.21 kBAdobe PDFView/Open
06_chapter 2.pdf456.75 kBAdobe PDFView/Open
07_chapter 3.pdf412.13 kBAdobe PDFView/Open
08_chapter 4.pdf534.31 kBAdobe PDFView/Open
09_chapter 5.pdf58.39 kBAdobe PDFView/Open
10_annexures.pdf308.48 kBAdobe PDFView/Open
80_recommendation.pdf68.72 kBAdobe PDFView/Open
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