1. Shodhganga@INFLIBNET
  2. Indian Institute of Technology Delhi
  3. Centre for Applied Research in Electronics
Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/604356
Full metadata record
DC FieldValueLanguage
dc.coverage.spatialCentre for Applied Research in Electronics
dc.date.accessioned2024-12-03T06:38:21Z-
dc.date.available2024-12-03T06:38:21Z-
dc.identifier.urihttp://hdl.handle.net/10603/604356-
dc.description.abstractAbstract Available
dc.format.extentNA
dc.languageEnglish
dc.relationTH2554
dc.rightsuniversity
dc.titleSome aspects of silicon micro matching technology for MEMS application
dc.title.alternativeNA
dc.creator.researcherJanak Singh
dc.subject.keywordEngineering
dc.subject.keywordEngineering and Technology
dc.subject.keywordEngineering Electrical and Electronic
dc.description.noteNA
dc.contributor.guideChandra, Sudhir
dc.publisher.placeDelhi
dc.publisher.universityIndian Institute of Technology Delhi
dc.publisher.institutionCentre for Applied Research in Electronics
dc.date.registered
dc.date.completed1997
dc.date.awarded1997
dc.format.dimensionsNA
dc.format.accompanyingmaterialDVD
dc.source.universityUniversity
dc.type.degreePh.D.
Appears in Departments:Centre for Applied Research in Electronics

Files in This Item:
File Description SizeFormat 
01_title.pdfAttached File11.14 kBAdobe PDFView/Open
02_prelim pages.pdf112.99 kBAdobe PDFView/Open
03_content.pdf34.37 kBAdobe PDFView/Open
04_abstract.pdf27.34 kBAdobe PDFView/Open
05_chapter 1.pdf175.21 kBAdobe PDFView/Open
06_chapter 2.pdf456.75 kBAdobe PDFView/Open
07_chapter 3.pdf412.13 kBAdobe PDFView/Open
08_chapter 4.pdf534.31 kBAdobe PDFView/Open
09_chapter 5.pdf58.39 kBAdobe PDFView/Open
10_annexures.pdf308.48 kBAdobe PDFView/Open
80_recommendation.pdf68.72 kBAdobe PDFView/Open
Show simple item record


Items in Shodhganga are licensed under Creative Commons Licence Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0).

Altmetric Badge: