1. Shodhganga@INFLIBNET
  2. Indian Institute of Technology Delhi
  3. Centre for Applied Research in Electronics
Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/587731
Title: Investigation of RF sputtered films for rapid prototyping of micro electro mechanical systems MEMS
Researcher: Bhatt, Vivekanand
Guide(s): Chandra, Sudhir
Keywords: Engineering
Engineering and Technology
Engineering Electrical and Electronic
University: Indian Institute of Technology Delhi
Completed Date: 2008
Abstract: Abstract Available
Pagination: NA
URI: http://hdl.handle.net/10603/587731
Appears in Departments:Centre for Applied Research in Electronics

Files in This Item:
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01_title.pdfAttached File313.83 kBAdobe PDFView/Open
02_prelim pages.pdf501.64 kBAdobe PDFView/Open
03_content.pdf349 kBAdobe PDFView/Open
04_abstract.pdf346.36 kBAdobe PDFView/Open
05_chapter 1.pdf558.84 kBAdobe PDFView/Open
06_chapter 2.pdf9.05 MBAdobe PDFView/Open
07_chapter 3.pdf4.47 MBAdobe PDFView/Open
08_chapter 4.pdf4.59 MBAdobe PDFView/Open
09_chapter 5.pdf11.06 MBAdobe PDFView/Open
10_chapter 6.pdf11.07 MBAdobe PDFView/Open
11_chapter 7.pdf386.77 kBAdobe PDFView/Open
12_annexures.pdf722.24 kBAdobe PDFView/Open
80_recommendation.pdf398.63 kBAdobe PDFView/Open
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