Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/587731
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.coverage.spatial | Centre for Applied Research in Electronics | |
| dc.date.accessioned | 2024-09-06T09:05:08Z | - |
| dc.date.available | 2024-09-06T09:05:08Z | - |
| dc.identifier.uri | http://hdl.handle.net/10603/587731 | - |
| dc.description.abstract | Abstract Available | |
| dc.format.extent | NA | |
| dc.language | English | |
| dc.relation | TH3644 | |
| dc.rights | university | |
| dc.title | Investigation of RF sputtered films for rapid prototyping of micro electro mechanical systems MEMS | |
| dc.title.alternative | NA | |
| dc.creator.researcher | Bhatt, Vivekanand | |
| dc.subject.keyword | Engineering | |
| dc.subject.keyword | Engineering and Technology | |
| dc.subject.keyword | Engineering Electrical and Electronic | |
| dc.description.note | NA | |
| dc.contributor.guide | Chandra, Sudhir | |
| dc.publisher.place | Delhi | |
| dc.publisher.university | Indian Institute of Technology Delhi | |
| dc.publisher.institution | Centre for Applied Research in Electronics | |
| dc.date.registered | ||
| dc.date.completed | 2008 | |
| dc.date.awarded | 2008 | |
| dc.format.dimensions | NA | |
| dc.format.accompanyingmaterial | DVD | |
| dc.source.university | University | |
| dc.type.degree | Ph.D. | |
| Appears in Departments: | Centre for Applied Research in Electronics | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title.pdf | Attached File | 313.83 kB | Adobe PDF | View/Open |
| 02_prelim pages.pdf | 501.64 kB | Adobe PDF | View/Open | |
| 03_content.pdf | 349 kB | Adobe PDF | View/Open | |
| 04_abstract.pdf | 346.36 kB | Adobe PDF | View/Open | |
| 05_chapter 1.pdf | 558.84 kB | Adobe PDF | View/Open | |
| 06_chapter 2.pdf | 9.05 MB | Adobe PDF | View/Open | |
| 07_chapter 3.pdf | 4.47 MB | Adobe PDF | View/Open | |
| 08_chapter 4.pdf | 4.59 MB | Adobe PDF | View/Open | |
| 09_chapter 5.pdf | 11.06 MB | Adobe PDF | View/Open | |
| 10_chapter 6.pdf | 11.07 MB | Adobe PDF | View/Open | |
| 11_chapter 7.pdf | 386.77 kB | Adobe PDF | View/Open | |
| 12_annexures.pdf | 722.24 kB | Adobe PDF | View/Open | |
| 80_recommendation.pdf | 398.63 kB | Adobe PDF | View/Open |
Items in Shodhganga are licensed under Creative Commons Licence Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0).
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