Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/5860
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.coverage.spatial | Instrumentation | en_US |
| dc.date.accessioned | 2012-12-24T11:30:18Z | - |
| dc.date.available | 2012-12-24T11:30:18Z | - |
| dc.date.issued | 2012-12-24 | - |
| dc.identifier.uri | http://hdl.handle.net/10603/5860 | - |
| dc.description.abstract | None | en_US |
| dc.format.extent | 202p. | en_US |
| dc.language | English | en_US |
| dc.relation | -- | en_US |
| dc.rights | university | en_US |
| dc.title | Preparation and characterization of High k Aluminum Oxide Thin Films by Atomic Layer Deposition for Gate Dielectric applications | en_US |
| dc.title.alternative | en_US | |
| dc.creator.researcher | Philip, Anu | en_US |
| dc.subject.keyword | Instrumentation | en_US |
| dc.subject.keyword | High-k Aluminum Oxide | en_US |
| dc.subject.keyword | Atomic Layer | en_US |
| dc.subject.keyword | Gate Dielectric applications | en_US |
| dc.description.note | Summary and Appendix p. 196-202, References included in chapters | en_US |
| dc.contributor.guide | Rajeev Kumar K | en_US |
| dc.publisher.place | Cochin | en_US |
| dc.publisher.university | Cochin University of Science and Technology | en_US |
| dc.publisher.institution | Department of Instrumentation | en_US |
| dc.date.registered | n.d. | en_US |
| dc.date.completed | December, 2011 | en_US |
| dc.date.awarded | 2012 | en_US |
| dc.format.dimensions | -- | en_US |
| dc.format.accompanyingmaterial | None | en_US |
| dc.type.degree | Ph.D. | en_US |
| dc.source.inflibnet | INFLIBNET | en_US |
| Appears in Departments: | Department of Instrumentation | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title.pdf | Attached File | 226.1 kB | Adobe PDF | View/Open |
| 02_certificate.pdf | 137.55 kB | Adobe PDF | View/Open | |
| 03_declaration.pdf | 105.04 kB | Adobe PDF | View/Open | |
| 04_acknowledgement.pdf | 208.19 kB | Adobe PDF | View/Open | |
| 05_contents.pdf | 146.92 kB | Adobe PDF | View/Open | |
| 06_preface.pdf | 208.4 kB | Adobe PDF | View/Open | |
| 07_chapter 1.pdf | 937.18 kB | Adobe PDF | View/Open | |
| 08_chapter 2.pdf | 771.29 kB | Adobe PDF | View/Open | |
| 09_chapter 3.pdf | 1.22 MB | Adobe PDF | View/Open | |
| 10_chapter 4.pdf | 685.02 kB | Adobe PDF | View/Open | |
| 11_chapter 5.pdf | 857 kB | Adobe PDF | View/Open | |
| 12_chapter 6.pdf | 1.32 MB | Adobe PDF | View/Open | |
| 13_chapter 7.pdf | 2.8 MB | Adobe PDF | View/Open | |
| 14_chapter 8.pdf | 302.74 kB | Adobe PDF | View/Open |
Items in Shodhganga are licensed under Creative Commons Licence Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0).
Altmetric Badge: