Modeling and characteristics Analysis of radio frequency micro Electromechanical system devices

Abstract

Micro Electro Mechanical Systems MEMS devices demonstrated newlinea wide range of sensing and actuation applications These mechanical newlineelements present now a days extension to the Radio Frequency RF world as newlinekey elements for highly reconfigurable systems frequency references and newlinesignal processors This thesis presents the simulation modeling design and newlineanalysis of RF MEMS switches and Distributed MEMS Transmission Line newline DMTL phase shifters The work primarily concerns with the reduction of newlineactuation voltage and optimised design of various RF MEMS switches for newlineminimum insertion loss and maximum isolation newlineA novel model of calculating spring constant and pull down voltage newlinewith critical stress consideration for fixed fixed beam is reported in this work newlineThis also presents characteristics analysis of RF MEMS capacitive series and newlineshunt switches lateral switches and micro machined capacitive switches in newlineterms of its S parameters For fixed fixed beam the stability analysis in newlinebeam position due to positive feedback and the solution by adding series newlinecapacitance in the DC path of the beam for increasing the stability region is newlineproposed For the application of implemented work DMTL with RF MEMS newlineswitches optimization is also carried out for maximum phase shift with newlineminimum insertion loss The static and dynamic characteristics analyses for newlinesingle and double beam lateral series switches are performed for achieving the newlineoptimum circuit parameters with minimum actuation voltage newline newline