Analysis of structural magnetic and mechanical behavior of mo co deposited ni niw cow thin films for mems based applications

Abstract

The newest growing technology for making tiny devices like sensors and micro gears is called Micro Electro-Mechanical System (MEMS). For the MEMS applications, the ferromagnetic materials especially soft magnetic materials are chosen for the fabrication. Soft magnetic materials like NiMo, CoMo are frequently utilized in MEMS. NiMo/CoMo films were employed in sensors, actuators and flux directing components for hard disc magnetic recording heads because of their outstanding soft magnetic characteristics. W can be added to the NiMo film to enhance its structural, mechanical, magnetic and corrosion resistant capabilities. The NiMo and CoMo films have significantly enhanced corrosion resistance after alloying with W which is most essential property for device-based applications. The objective of the research work is to synthesize NiMo, NiMoW and CoMoW thin films from citrate electrolytic bath such as diammonium, by adjusting bath temperature, concentration, current density, and time variations to get the high-quality thin layers with excellent structural, magnetic and mechanical properties. newlineThe electrodeposition approach is the best way to prepare thin layers which are suitable for MEMS based devices. The following benefits are associated with electrodeposition. newline Appropriate technique for large-scale film production. newline More affordable than traditional physical techniques. newline Little to no chemical waste and no requirement for vacuum. newline Monitoring the deposition process is simple. newline