Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/511163
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dc.coverage.spatial
dc.date.accessioned2023-09-08T06:45:28Z-
dc.date.available2023-09-08T06:45:28Z-
dc.identifier.urihttp://hdl.handle.net/10603/511163-
dc.description.abstractnewline Yes newline
dc.format.extentiv, 132p
dc.languageEnglish
dc.relation
dc.rightsuniversity
dc.titleDeposition and characterization of thin film coatings by microwave electron cyclotron resonance ECR plasmas
dc.title.alternative
dc.creator.researcherSingh, Sujit Bansraj
dc.subject.keywordCharacterization Techniques
dc.subject.keywordMagnetron Sputtering
dc.subject.keywordMicrowave Electron Cyclotron
dc.subject.keywordPhysical Sciences
dc.subject.keywordPhysics
dc.subject.keywordPhysics Atomic Molecular and Chemical
dc.subject.keywordResonance Plasmas
dc.description.note
dc.contributor.guidePatil, D S
dc.publisher.placeMumbai
dc.publisher.universityUniversity of Mumbai
dc.publisher.institutionPhysics, Bhabha Atomic Research Centre
dc.date.registered
dc.date.completed2008
dc.date.awarded
dc.format.dimensions
dc.format.accompanyingmaterialDVD
dc.source.universityUniversity
dc.type.degreePh.D.
Appears in Departments:Physics, Bhabha Atomic Research Centre

Files in This Item:
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01_title.pdfAttached File282.27 kBAdobe PDFView/Open
02_prelim pages.pdf3.4 MBAdobe PDFView/Open
03_contents.pdf809.03 kBAdobe PDFView/Open
04_abstract.pdf864.92 kBAdobe PDFView/Open
05_chapter 1.pdf23.94 MBAdobe PDFView/Open
06_chapter 2.pdf12.11 MBAdobe PDFView/Open
07_chapter 3.pdf2.49 MBAdobe PDFView/Open
08_chapter 4.pdf26.21 MBAdobe PDFView/Open
09_chapter 5.pdf2 MBAdobe PDFView/Open
10_annexures.pdf1.74 MBAdobe PDFView/Open
80_recommendation.pdf2.28 MBAdobe PDFView/Open


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