Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/511163
Title: Deposition and characterization of thin film coatings by microwave electron cyclotron resonance ECR plasmas
Researcher: Singh, Sujit Bansraj
Guide(s): Patil, D S
Keywords: Characterization Techniques
Magnetron Sputtering
Microwave Electron Cyclotron
Physical Sciences
Physics
Physics Atomic Molecular and Chemical
Resonance Plasmas
University: University of Mumbai
Completed Date: 2008
Abstract: newline Yes newline
Pagination: iv, 132p
URI: http://hdl.handle.net/10603/511163
Appears in Departments:Physics, Bhabha Atomic Research Centre

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01_title.pdfAttached File282.27 kBAdobe PDFView/Open
02_prelim pages.pdf3.4 MBAdobe PDFView/Open
03_contents.pdf809.03 kBAdobe PDFView/Open
04_abstract.pdf864.92 kBAdobe PDFView/Open
05_chapter 1.pdf23.94 MBAdobe PDFView/Open
06_chapter 2.pdf12.11 MBAdobe PDFView/Open
07_chapter 3.pdf2.49 MBAdobe PDFView/Open
08_chapter 4.pdf26.21 MBAdobe PDFView/Open
09_chapter 5.pdf2 MBAdobe PDFView/Open
10_annexures.pdf1.74 MBAdobe PDFView/Open
80_recommendation.pdf2.28 MBAdobe PDFView/Open
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