Shodhganga : a reservoir of Indian theses @ INFLIBNET
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Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/49675
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.coverage.spatial | Applied Physics | en_US |
| dc.date.accessioned | 2015-09-30T10:07:15Z | - |
| dc.date.available | 2015-09-30T10:07:15Z | - |
| dc.date.issued | 2015-09-30 | - |
| dc.identifier.uri | http://hdl.handle.net/10603/49675 | - |
| dc.description.abstract | Abstract available newline newline | en_US |
| dc.format.extent | iv, 198p. | en_US |
| dc.language | English | en_US |
| dc.relation | _ | en_US |
| dc.rights | university | en_US |
| dc.title | A study of front_side_etching technology in the fabrication of vacuum sealed absolute micro pressure sensor | en_US |
| dc.title.alternative | en_US | |
| dc.creator.researcher | Alvi, Parvej Ahmad | en_US |
| dc.subject.keyword | Front_Side_Etching Technology, Fabrication, Vacuum Sealed, Micro Pressure Sensor | en_US |
| dc.description.note | Appendix given | en_US |
| dc.contributor.guide | Lal, K M | en_US |
| dc.publisher.place | Aligarh | en_US |
| dc.publisher.university | Aligarh Muslim University | en_US |
| dc.publisher.institution | Department of Applied Physics | en_US |
| dc.date.registered | n.d. | en_US |
| dc.date.completed | 2007 | en_US |
| dc.date.awarded | n.d. | en_US |
| dc.format.dimensions | _ | en_US |
| dc.format.accompanyingmaterial | DVD | en_US |
| dc.source.university | University | en_US |
| dc.type.degree | Ph.D. | en_US |
| Appears in Departments: | Department of Applied Physics | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title.pdf | Attached File | 215.78 kB | Adobe PDF | View/Open |
| 02_certificate.pdf | 589.07 kB | Adobe PDF | View/Open | |
| 03_acknowledgement.pdf | 89.16 kB | Adobe PDF | View/Open | |
| 04_national conference.pdf | 96.04 kB | Adobe PDF | View/Open | |
| 05_abstract.pdf | 196.3 kB | Adobe PDF | View/Open | |
| 06_contents.pdf | 243.33 kB | Adobe PDF | View/Open | |
| 07_chapter 1.pdf | 3.73 MB | Adobe PDF | View/Open | |
| 08_chapter 2.pdf | 1.56 MB | Adobe PDF | View/Open | |
| 09_chapter 3.pdf | 2.04 MB | Adobe PDF | View/Open | |
| 10_chapter 4.pdf | 980.07 kB | Adobe PDF | View/Open | |
| 11_chapter 5.pdf | 2.57 MB | Adobe PDF | View/Open | |
| 12_chapter 6.pdf | 6.25 MB | Adobe PDF | View/Open | |
| 13_chapter 7.pdf | 11.93 MB | Adobe PDF | View/Open |
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