Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/487370
Title: Multiple beams interferometry for array illuminator and its applications
Researcher: Patra, Ardhendu Sekhar
Guide(s): Khare, Alika
Keywords: Physical Sciences
Physics
Physics Applied
University: Indian Institute of Technology Guwahati
Completed Date: 2005
Abstract: The present work is aimed towards generation and characterization of the arrays using various interferometric configurations Heterodyne interferometric configurations using polarized lights was developed and studied The expressions for the intensity distribution of all configurations presented in the thesis were worked out and compered with the experimental observations The applications of these optical arrays as a single step microlithography technique was proposed and demonstrated Line int
Pagination: Not Available
URI: http://hdl.handle.net/10603/487370
Appears in Departments:DEPARTMENT OF PHYSICS

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