Surface acoustic wave devices on silicon substrate using patterned and thin film zno

Abstract

Surface acoustic wave SAW is a type of wave that propagates on the surface of an elastic material The concentration of energy of these waves is higher at the surface and decreases exponentially along the depth of the material In general SAW devices are realized on polished piezoelectric substrates in conjunction with metallic interdigital transducer IDT for the transduction of electric energy to acoustic energy and vice versa Various types of surface waves like Rayleigh wave shear horizo