Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/474408
| Title: | Sustainable Design of Clean Room for Microelectro mechanical Systems Fabrication and Micro manufacturing Applications |
| Researcher: | Rao, V Srinivasa |
| Guide(s): | Regalla, Srinivasa Prakash and Ramaswamy, Kannan |
| Keywords: | Engineering Engineering and Technology Engineering Mechanical |
| University: | Birla Institute of Technology and Science |
| Completed Date: | 2019 |
| Abstract: | newline |
| Pagination: | |
| URI: | http://hdl.handle.net/10603/474408 |
| Appears in Departments: | Mechanical Engineering |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title.pdf | Attached File | 164.42 kB | Adobe PDF | View/Open |
| 02_prelim pages.pdf | 351.99 kB | Adobe PDF | View/Open | |
| 03_content.pdf | 74.65 kB | Adobe PDF | View/Open | |
| 04_abstract.pdf | 88.23 kB | Adobe PDF | View/Open | |
| 05_chapter1.pdf | 444.3 kB | Adobe PDF | View/Open | |
| 06_chapter2.pdf | 183.76 kB | Adobe PDF | View/Open | |
| 07_chapter3.pdf | 7.26 MB | Adobe PDF | View/Open | |
| 08_chapter4.pdf | 3.24 MB | Adobe PDF | View/Open | |
| 09_chapter5.pdf | 6.53 MB | Adobe PDF | View/Open | |
| 10_chapter6.pdf | 1.04 MB | Adobe PDF | View/Open | |
| 11_chapter7.pdf | 127.67 kB | Adobe PDF | View/Open | |
| 12_annexures.pdf | 188.38 kB | Adobe PDF | View/Open | |
| 80_recommendation.pdf | 286.7 kB | Adobe PDF | View/Open |
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