1. Shodhganga@INFLIBNET
  2. Birla Institute of Technology and Science
  3. Mechanical Engineering
Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/474408
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DC FieldValueLanguage
dc.coverage.spatial
dc.date.accessioned2023-04-03T11:57:06Z-
dc.date.available2023-04-03T11:57:06Z-
dc.identifier.urihttp://hdl.handle.net/10603/474408-
dc.description.abstractnewline
dc.format.extent
dc.languageEnglish
dc.relation
dc.rightsuniversity
dc.titleSustainable Design of Clean Room for Microelectro mechanical Systems Fabrication and Micro manufacturing Applications
dc.title.alternative
dc.creator.researcherRao, V Srinivasa
dc.subject.keywordEngineering
dc.subject.keywordEngineering and Technology
dc.subject.keywordEngineering Mechanical
dc.description.note
dc.contributor.guideRegalla, Srinivasa Prakash and Ramaswamy, Kannan
dc.publisher.placePilani
dc.publisher.universityBirla Institute of Technology and Science
dc.publisher.institutionMechanical Engineering
dc.date.registered2012
dc.date.completed2019
dc.date.awarded2019
dc.format.dimensions
dc.format.accompanyingmaterialDVD
dc.source.universityUniversity
dc.type.degreePh.D.
Appears in Departments:Mechanical Engineering

Files in This Item:
File Description SizeFormat 
01_title.pdfAttached File164.42 kBAdobe PDFView/Open
02_prelim pages.pdf351.99 kBAdobe PDFView/Open
03_content.pdf74.65 kBAdobe PDFView/Open
04_abstract.pdf88.23 kBAdobe PDFView/Open
05_chapter1.pdf444.3 kBAdobe PDFView/Open
06_chapter2.pdf183.76 kBAdobe PDFView/Open
07_chapter3.pdf7.26 MBAdobe PDFView/Open
08_chapter4.pdf3.24 MBAdobe PDFView/Open
09_chapter5.pdf6.53 MBAdobe PDFView/Open
10_chapter6.pdf1.04 MBAdobe PDFView/Open
11_chapter7.pdf127.67 kBAdobe PDFView/Open
12_annexures.pdf188.38 kBAdobe PDFView/Open
80_recommendation.pdf286.7 kBAdobe PDFView/Open
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