Design and analysis of a wearable piezoresistive mems accelerometer with low cross axis sensitivity for neurological disease diagnosis

Abstract

The aim of this thesis is to make the performance of Inertial MEMS micro electro mechanical system sensor suitable for neurological disease diagnosis Different types of applications have different requirements For example some applications require higher performance in terms of sensitivity and precision whereas others may require sensors with smaller dimensions Tremor 2 Hz 12 Hz and seizure 0 5 Hz 29 Hz are the symptoms of neurological disorders which require wearable sensors for conti