Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/456211
| Title: | Formulation of slurry for tantalum chemical mechanical planarization and its electrochemical characterization |
| Researcher: | Shukla,Arpita |
| Guide(s): | Manivannan,R and Victoria,S Noyel |
| Keywords: | Chemical Engineering Chemical mechanical planarization Copper Engineering and Technology Material and removal Mechanism Tantalum |
| University: | National Institute of Technology Raipur |
| Completed Date: | 2022 |
| Abstract: | Attached newline |
| Pagination: | vii,123 |
| URI: | http://hdl.handle.net/10603/456211 |
| Appears in Departments: | Chemical Engineering |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 1_title.pdf | Attached File | 72.44 kB | Adobe PDF | View/Open |
| 2_preliminary pages.pdf | 806.01 kB | Adobe PDF | View/Open | |
| 3_contents.pdf | 131.24 kB | Adobe PDF | View/Open | |
| 4_abstract.pdf | 81.58 kB | Adobe PDF | View/Open | |
| 5_chapter 1.pdf | 513.66 kB | Adobe PDF | View/Open | |
| 6_chapter 2.pdf | 341.26 kB | Adobe PDF | View/Open | |
| 7_chapter 3.pdf | 950.42 kB | Adobe PDF | View/Open | |
| 80_recommendation.pdf | 153.28 kB | Adobe PDF | View/Open | |
| 8_chapter 4.pdf | 953.92 kB | Adobe PDF | View/Open | |
| 9_annexures.pdf | 1.07 MB | Adobe PDF | View/Open |
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