Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/456211
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.coverage.spatial | ||
dc.date.accessioned | 2023-02-06T06:19:21Z | - |
dc.date.available | 2023-02-06T06:19:21Z | - |
dc.identifier.uri | http://hdl.handle.net/10603/456211 | - |
dc.description.abstract | Attached newline | |
dc.format.extent | vii,123 | |
dc.language | English | |
dc.relation | ||
dc.rights | university | |
dc.title | Formulation of slurry for tantalum chemical mechanical planarization and its electrochemical characterization | |
dc.title.alternative | ||
dc.creator.researcher | Shukla,Arpita | |
dc.subject.keyword | Chemical Engineering | |
dc.subject.keyword | Chemical mechanical planarization | |
dc.subject.keyword | Copper | |
dc.subject.keyword | Engineering and Technology | |
dc.subject.keyword | Material and removal Mechanism | |
dc.subject.keyword | Tantalum | |
dc.description.note | ||
dc.contributor.guide | Manivannan,R and Victoria,S Noyel | |
dc.publisher.place | Raipur | |
dc.publisher.university | National Institute of Technology Raipur | |
dc.publisher.institution | Chemical Engineering | |
dc.date.registered | 2017 | |
dc.date.completed | 2022 | |
dc.date.awarded | 2022 | |
dc.format.dimensions | 30 cm x 21 cm | |
dc.format.accompanyingmaterial | None | |
dc.source.university | University | |
dc.type.degree | Ph.D. | |
Appears in Departments: | Chemical Engineering |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
1_title.pdf | Attached File | 72.44 kB | Adobe PDF | View/Open |
2_preliminary pages.pdf | 806.01 kB | Adobe PDF | View/Open | |
3_contents.pdf | 131.24 kB | Adobe PDF | View/Open | |
4_abstract.pdf | 81.58 kB | Adobe PDF | View/Open | |
5_chapter 1.pdf | 513.66 kB | Adobe PDF | View/Open | |
6_chapter 2.pdf | 341.26 kB | Adobe PDF | View/Open | |
7_chapter 3.pdf | 950.42 kB | Adobe PDF | View/Open | |
80_recommendation.pdf | 153.28 kB | Adobe PDF | View/Open | |
8_chapter 4.pdf | 953.92 kB | Adobe PDF | View/Open | |
9_annexures.pdf | 1.07 MB | Adobe PDF | View/Open |
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