Analytical approach for improving sensitivity of saw based gas sensor

Abstract

The design, analysis, optimization and simulation of SAW based gas sensors are presented. A SiO2 and zinc oxide nano multilayered structure is proposed to enhance the sensitivity of SAW base gas sensor. Different materials are considered for the design of intermediate layer for optimization purposes. The sensitivity of the sensor could be improved due to increased active surface area, intermediate layer thickness and electrodes spacing. Overall, main focus is to enhance sensitivity by varying number of IDT legs, thin film layer thickness and materials of thin film which include ZnO, SnO2 etc. newline