1. Shodhganga@INFLIBNET
  2. Indian Institute of Technology Madras
  3. Mechanical Engineering
Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/445242
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DC FieldValueLanguage
dc.coverage.spatial
dc.date.accessioned2023-01-13T09:11:25Z-
dc.date.available2023-01-13T09:11:25Z-
dc.identifier.urihttp://hdl.handle.net/10603/445242-
dc.description.abstractnewline
dc.format.extentxxii, 192
dc.languageEnglish
dc.relation129
dc.rightsuniversity
dc.titleUltrashort Pulse Laser Micromachining Of Silicon
dc.title.alternative
dc.creator.researcherShalini Singh
dc.subject.keywordEngineering
dc.subject.keywordEngineering and Technology
dc.subject.keywordEngineering Mechanical
dc.description.note
dc.contributor.guideSAMUEL G L
dc.publisher.placeChennai
dc.publisher.universityIndian Institute of Technology Madras
dc.publisher.institutionMechanical Engineering
dc.date.registered2015
dc.date.completed2022
dc.date.awarded2022
dc.format.dimensions
dc.format.accompanyingmaterialNone
dc.source.universityUniversity
dc.type.degreePh.D.
Appears in Departments:Mechanical Engineering

Files in This Item:
File Description SizeFormat 
01_title.pdfAttached File172.48 kBAdobe PDFView/Open
02_prelim pages.pdf314.35 kBAdobe PDFView/Open
03_content.pdf45.78 kBAdobe PDFView/Open
04_abstract.pdf88.58 kBAdobe PDFView/Open
05_chapter 1.pdf1.24 MBAdobe PDFView/Open
06_chapter 2.pdf1.59 MBAdobe PDFView/Open
07_chapter 3.pdf2.23 MBAdobe PDFView/Open
08_chapter 4.pdf2.62 MBAdobe PDFView/Open
09_chapter 5.pdf3.92 MBAdobe PDFView/Open
10_annexures.pdf205.74 kBAdobe PDFView/Open
80_recommendation.pdf194.65 kBAdobe PDFView/Open
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