Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/436710
| Title: | Investigation of electrical properties of zro2 and hfo2 high k dielectric thin films in mos capacitors |
| Researcher: | Udaya Bhanu, J |
| Guide(s): | Thangadurai, P |
| Keywords: | Physical Sciences Multidisciplinary Nanoscience and Nanotechnology complementary metal oxide semiconductor microelectronic memory MOS capacitors |
| University: | Pondicherry University |
| Completed Date: | 2019 |
| Abstract: | newline |
| Pagination: | 159p. |
| URI: | http://hdl.handle.net/10603/436710 |
| Appears in Departments: | Centre for Nano Sciences & Technology |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_tilte.pdf | Attached File | 114.43 kB | Adobe PDF | View/Open |
| 02_ prelim pages.pdf | 482.46 kB | Adobe PDF | View/Open | |
| 03_content.pdf | 33.17 kB | Adobe PDF | View/Open | |
| 04_ preface.pdf | 37.05 kB | Adobe PDF | View/Open | |
| 05_ chapter 1.pdf | 844.29 kB | Adobe PDF | View/Open | |
| 06_ chapter 2.pdf | 1.68 MB | Adobe PDF | View/Open | |
| 07_ chapter 3.pdf | 2.11 MB | Adobe PDF | View/Open | |
| 08_ chapter 4.pdf | 1.93 MB | Adobe PDF | View/Open | |
| 09_ chapter 5.pdf | 1.65 MB | Adobe PDF | View/Open | |
| 10_ chapter 6.pdf | 1.81 MB | Adobe PDF | View/Open | |
| 11_ chapter 7.pdf | 187.65 kB | Adobe PDF | View/Open | |
| 12_annexures.pdf | 94.34 kB | Adobe PDF | View/Open | |
| 80_recommendation.pdf | 302.29 kB | Adobe PDF | View/Open |
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