Development of grating array based zonal wavefront sensor for in situ surface profiling during the growth of the thin film in a deposition system

Abstract

In this thesis a novel grating array based wavefront sensing GAWS scheme is proposed and demonstrated experimentally which can be used to measure both the thickness and surface profiles of the thin films simultaneously as a function of time during the growth process of the film This scheme does not require any prior information on the properties of the substrate and target material provided both the substrate and film are reflecting We use a grating array based wavefront sensor GAWS asse...