Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/420328
Title: | Nanofinishing and surface integrity enhancement of inertial sensor microstructures using medium pressure plasma process |
Researcher: | Dev, D. Sam Dayala |
Guide(s): | Das, Manas |
Keywords: | Engineering Engineering and Technology Engineering Mechanical |
University: | Indian Institute of Technology Guwahati |
Completed Date: | 2019 |
Abstract: | Surface integrity influences several functional parameters such as friction wear and tear ability of distributing and holding lubricant thin film coating etc It is not uncommon that aerospace inertial sensor technology demands 732 zero 8482 surface and subsurface defects up to atomic level on sensing element microstructures These microstructures are mostly nonmetallic brittle materials such as glass fused silica silica etc and are machined and polished such that the surface integrity is ma... |
Pagination: | Not Available |
URI: | http://hdl.handle.net/10603/420328 |
Appears in Departments: | DEPARTMENT OF MECHANICAL ENGINEERING |
Files in This Item:
File | Description | Size | Format | |
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01_fulltext.pdf | Attached File | 12.1 MB | Adobe PDF | View/Open |
04_abstract.pdf | 154.11 kB | Adobe PDF | View/Open | |
80_recommendation.pdf | 863.11 kB | Adobe PDF | View/Open |
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