Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/324472
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.coverage.spatial | Scientific Instrumentation | |
| dc.date.accessioned | 2021-05-05T09:46:25Z | - |
| dc.date.available | 2021-05-05T09:46:25Z | - |
| dc.identifier.uri | http://hdl.handle.net/10603/324472 | - |
| dc.description.abstract | newline Design of MEMs based capacitive sensor with novel support structure and PZT Sensing Element for pressure sensing applications | |
| dc.format.extent | ||
| dc.language | English | |
| dc.relation | ||
| dc.rights | university | |
| dc.title | Design of MEMs based capacitive sensor with novel support structure and PZT Sensing Element for pressure sensing applications | |
| dc.title.alternative | ||
| dc.creator.researcher | Manoharan P A | |
| dc.subject.keyword | Physical Sciences | |
| dc.subject.keyword | Multidisciplinary | |
| dc.subject.keyword | Multidisciplinary Sciences | |
| dc.description.note | ||
| dc.contributor.guide | Nedumaran D | |
| dc.publisher.place | Chennai | |
| dc.publisher.university | University of Madras | |
| dc.publisher.institution | Central Instrumentation and Service Department | |
| dc.date.registered | ||
| dc.date.completed | 2012 | |
| dc.date.awarded | ||
| dc.format.dimensions | ||
| dc.format.accompanyingmaterial | DVD | |
| dc.source.university | University | |
| dc.type.degree | Ph.D. | |
| Appears in Departments: | Central Instrumentation and Service Department | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01 tittle.pdf | Attached File | 120.96 kB | Adobe PDF | View/Open |
| 02 certificate.pdf | 121.4 kB | Adobe PDF | View/Open | |
| 03 preliminary pages.pdf | 459.29 kB | Adobe PDF | View/Open | |
| 04 chapter 1.pdf | 2.37 MB | Adobe PDF | View/Open | |
| 05 chapter 2.pdf | 2.38 MB | Adobe PDF | View/Open | |
| 06 chapter 3.pdf | 2.32 MB | Adobe PDF | View/Open | |
| 07 chapter 4.pdf | 2.31 MB | Adobe PDF | View/Open | |
| 08 chapter 5.pdf | 2.37 MB | Adobe PDF | View/Open | |
| 09 chapter 6.pdf | 2.39 MB | Adobe PDF | View/Open | |
| 10 chapter 7.pdf | 2.24 MB | Adobe PDF | View/Open | |
| 11 appendix.pdf | 54.83 kB | Adobe PDF | View/Open | |
| 80_recommendation.pdf | 7.69 MB | Adobe PDF | View/Open |
Items in Shodhganga are licensed under Creative Commons Licence Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0).
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