1. Shodhganga@INFLIBNET
  2. University of Madras
  3. Central Instrumentation and Service Department
Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/324472
Title: Design of MEMs based capacitive sensor with novel support structure and PZT Sensing Element for pressure sensing applications
Researcher: Manoharan P A
Guide(s): Nedumaran D
Keywords: Physical Sciences
Multidisciplinary
Multidisciplinary Sciences
University: University of Madras
Completed Date: 2012
Abstract: newline Design of MEMs based capacitive sensor with novel support structure and PZT Sensing Element for pressure sensing applications
Pagination: 
URI: http://hdl.handle.net/10603/324472
Appears in Departments:Central Instrumentation and Service Department

Files in This Item:
File Description SizeFormat 
01 tittle.pdfAttached File120.96 kBAdobe PDFView/Open
02 certificate.pdf121.4 kBAdobe PDFView/Open
03 preliminary pages.pdf459.29 kBAdobe PDFView/Open
04 chapter 1.pdf2.37 MBAdobe PDFView/Open
05 chapter 2.pdf2.38 MBAdobe PDFView/Open
06 chapter 3.pdf2.32 MBAdobe PDFView/Open
07 chapter 4.pdf2.31 MBAdobe PDFView/Open
08 chapter 5.pdf2.37 MBAdobe PDFView/Open
09 chapter 6.pdf2.39 MBAdobe PDFView/Open
10 chapter 7.pdf2.24 MBAdobe PDFView/Open
11 appendix.pdf54.83 kBAdobe PDFView/Open
80_recommendation.pdf7.69 MBAdobe PDFView/Open
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