Development of A Simulator For Micro Optic Electro Mechanical System MOEMS

Abstract

Micro-Electro-Mechanical Systems (MEMS) devices are integration of newlineElectrical/Electronics technology with Mechanical systems. The sizes of mechanical devices are newlinethree to six times larger than those of their electronic counterpart causing difficulties in their newlineusage at strategic locations and applications. They consume considerable amount of power for newlinetheir bigger sizes. The MEMS are highly reliable and consume low power. They have multiple newlinecomponents for perfect matching of parameters. The added advantage is minimization of costs newlinewhen fabricated in batch processing in very large quantities. newlineIf optical components are combined in MEMS technology, to allow motion and with newlineelectrical structures to provide actuation, new group of devices termed Micro-Optic- Electro- newlineMechanical System (MOEMS) is formed. It is a combination of optics, electronics and newlinemechanics in miniaturized way. newlineApplications of MOEMS include those of MEMS together with its application in the newlineareas of optical communication, data transfer, sensor, distributed unattended sensors, switch, newlinefilter, optical position encoder, control, mass data storage devices and systems, active newlineconformable surfaces for distributed aerodynamic control of aircraft, adaptive optic and precision newlineparts and material handling. newlineVarious researchers have presented many numerical models of MOEMS. However, these newlinemodels are not efficient to show the complete behavior of MEMS integrating the use of optics in newlinethem. The diffraction, reflection, refraction, electromagnetic interference, thermal, chemical and newlineother related factors have not been considered in an integrated manner.In the present work, an integrated approach to develop a complete simulator for designing newlinea MOEMS has been adopted considering principal parameters responsible for the operation of newlinethe MOEMS and their effects are examined on micro-actuator, micro-sensor and micro-optics. A newlinesuitable simulator is developed using mathematical equations and is validated with the data newlinealready available in the literature. A complete model