Shodhganga : a reservoir of Indian theses @ INFLIBNET
The Shodhganga@INFLIBNET Centre provides a platform for research students to deposit their Ph.D. theses and make it available to the entire scholarly community in open access.
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10603/133563
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.coverage.spatial | Electronic Science | |
| dc.date.accessioned | 2017-02-02T12:03:35Z | - |
| dc.date.available | 2017-02-02T12:03:35Z | - |
| dc.identifier.uri | http://hdl.handle.net/10603/133563 | - |
| dc.description.abstract | Abstract not available newline newline | |
| dc.format.extent | 179p. | |
| dc.language | English | |
| dc.relation | - | |
| dc.rights | university | |
| dc.title | Development and characterization of novel masking materials _polymers_ for silicon micromachining | |
| dc.title.alternative | - | |
| dc.creator.researcher | Bodas, Dhananjay S | |
| dc.subject.keyword | Micromachining, Fourier transform infrared spectroscopy, Pmma films, Re sputtering, Xps analysis | |
| dc.description.note | - | |
| dc.contributor.guide | Gangal, S A | |
| dc.publisher.place | Pune | |
| dc.publisher.university | Savitribai Phule Pune University | |
| dc.publisher.institution | Department of Electronic Science | |
| dc.date.registered | n.d | |
| dc.date.completed | 2004 | |
| dc.date.awarded | n.d. | |
| dc.format.dimensions | - | |
| dc.format.accompanyingmaterial | None | |
| dc.source.university | University | |
| dc.type.degree | Ph.D. | |
| Appears in Departments: | Department of Electronic Science | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 01_title.pdf | Attached File | 24.29 kB | Adobe PDF | View/Open |
| 02_declaration.pdf | 188.37 kB | Adobe PDF | View/Open | |
| 03_acknowledgement.pdf | 78.58 kB | Adobe PDF | View/Open | |
| 04_contents.pdf | 111.86 kB | Adobe PDF | View/Open | |
| 05_list of figures.pdf | 167.46 kB | Adobe PDF | View/Open | |
| 06_list of tables.pdf | 24.51 kB | Adobe PDF | View/Open | |
| 07_list of acronyms.pdf | 83.06 kB | Adobe PDF | View/Open | |
| 08_chapter 1.pdf | 4.17 MB | Adobe PDF | View/Open | |
| 09_chapter 2.pdf | 5.79 MB | Adobe PDF | View/Open | |
| 10_chapter 3.pdf | 3.51 MB | Adobe PDF | View/Open | |
| 11_chapter 4.pdf | 2.66 MB | Adobe PDF | View/Open | |
| 12_chapter 5.pdf | 1.54 MB | Adobe PDF | View/Open | |
| 13_chapter 6.pdf | 1.62 MB | Adobe PDF | View/Open | |
| 14_chapter 7.pdf | 248.61 kB | Adobe PDF | View/Open | |
| 15_list of publications.pdf | 117.65 kB | Adobe PDF | View/Open |
Items in Shodhganga are licensed under Creative Commons Licence Attribution-NonCommercial-ShareAlike 4.0 International (CC BY-NC-SA 4.0).
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