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Title: Design modeling and analysis of cantilever based mems devices with improved performance
Researcher: Kalaiarasi A R
Guide(s): Hosimin thilagar S
Keywords: Finite Element Method
Microactuator analytical modeling
Micro Electro Mechanical Systems
Upload Date: 31-Aug-2015
University: Anna University
Completed Date: 01/10/2014
Abstract: Micro Electro Mechanical Systems MEMS is a technology which is used to fabricate the components in miniature form in all science and engineering fields Cantilever is a simple device which is comparatively easy to design and fabricate and it also finds wide application as sensors and actuators in different areas of MEMS technology The literature review indicates the necessity of designing cantilever based MEMS devices with improved performance Therefore this thesis mainly concentrates on the design analytical modeling and fabrication of cantilever based MEMS devices with improved performance newlineThe pull in voltage models with the fringe fields are available in literature but only considered for limited range of dimensions So firstly the thesis takes into consideration of development of pull in voltage models for cantilever beam with fringe fields for wider range of dimensions The pull in voltage computed from these closed form models are compared with the FEM Finite Element Method simulation results and experimental results of the fabricated device The results are validated and it is observed that a particular pull in voltage model is better suited for only a particular range of dimension newlineThe second and third part of this thesis focuses on the improvement of displacement in comb drive which is the most widely used microactuator Analytical modeling of single finger with fringe field effect is done For the improvement of performance of this simple cantilever based comb drive non rectangular finger shapes have been considered newline newline
Pagination: xxiv, 184p.
Appears in Departments:Faculty of Electrical and Electronics Engineering

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01_title.pdfAttached File26.47 kBAdobe PDFView/Open
02_certificate.pdf422.99 kBAdobe PDFView/Open
03_abstract.pdf8.37 kBAdobe PDFView/Open
04_acknowledgement.pdf6.18 kBAdobe PDFView/Open
05_content.pdf144.2 kBAdobe PDFView/Open
06_chapter1.pdf243 kBAdobe PDFView/Open
07_chapter2.pdf2.16 MBAdobe PDFView/Open
08_chapter3.pdf284.85 kBAdobe PDFView/Open
09_chapter4.pdf683.15 kBAdobe PDFView/Open
10_chapter5.pdf1.2 MBAdobe PDFView/Open
11_chapter6.pdf150.48 kBAdobe PDFView/Open
12_reference.pdf575.74 kBAdobe PDFView/Open
13_publication.pdf62.99 kBAdobe PDFView/Open

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