Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/77385
Title: Investigations on the structural and optical properties of NbOx ZrOx and ZrO1 xNx thin films prepared by reactive DC magnetron sputtering process
Researcher: Venkataraj, S
Guide(s): Jayavel, R
Keywords: Characterization
Zirconium
Oxynitride
Sputtering
Ellipsometry
University: Anna University
Completed Date: 31/05/2002
Abstract: Abstract available
Pagination: xxiv, 203p.
URI: http://hdl.handle.net/10603/77385
Appears in Departments:Faculty of Science and Humanities

Files in This Item:
File Description SizeFormat 
01_title page.pdfAttached File21.8 kBAdobe PDFView/Open
02_certificate.pdf23.19 kBAdobe PDFView/Open
03_abstract.pdf234.54 kBAdobe PDFView/Open
04_acknowledgement.pdf45.94 kBAdobe PDFView/Open
05_content.pdf38.6 kBAdobe PDFView/Open
06_list of tables.pdf54.92 kBAdobe PDFView/Open
07_list of figures.pdf291.35 kBAdobe PDFView/Open
08_list of symbols abbreviations and nomenclatures.pdf30.41 kBAdobe PDFView/Open
09_chapter 1.pdf469.74 kBAdobe PDFView/Open
10_chapter 2.pdf1.2 MBAdobe PDFView/Open
11_chapter 3.pdf2.08 MBAdobe PDFView/Open
12_chapter 4.pdf2.7 MBAdobe PDFView/Open
13_chapter 5.pdf2.12 MBAdobe PDFView/Open
14_chapter 6.pdf849.28 kBAdobe PDFView/Open
15_summary and suggestions for future work.pdf314.28 kBAdobe PDFView/Open
16_references.pdf587.87 kBAdobe PDFView/Open
17_list of publications.pdf37.28 kBAdobe PDFView/Open
18_vitae.pdf35.9 kBAdobe PDFView/Open


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