Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/29397
Title: Chemical vapour deposition of Copper on aluminium
Researcher: Rajagopal G
Guide(s): Periasamy V M
Keywords: Acetylacetonate
Chemical Vapour Deposition
Physical Vapour Deposition
Upload Date: 28-Nov-2014
University: Anna University
Completed Date: 01/12/2008
Abstract: Among all the deposition techniques Chemical Vapour Deposition newline CVD has important advantages that it is a non line of sight process While newlinePhysical Vapour Deposition PVD delivers atoms or small groups of atoms newlineto the substrate surface CVD carries molecules These molecules can newlineadsorb desorb or diffuse on the evolving film many times before they newlinedecompose and further film growth Consequently more uniform films are newlineformed and conformal coverage is more likely with CVD newlineChemical Vapour Deposition of films and coatings involve the newlinechemical reactions of gaseous reactants on or near the vicinity of a heated newlinesubstrate surface This atomistic deposition method can provide highly pure newlinematerials with structural control at atomic or nanometer scale level newlineMoreover it can produce single layer multilayer composite nano structured newlineand functionally graded coating materials with well controlled dimension and newlineunique structure at low processing temperatures The main objective of the newline present study was to build an indigenous CVD system and to deposit and newline characterize copper on aluminium using newlinecopper acetylacetonate as the precursor and using argon and nitrogen as newlinecarrier gases separately The design of a CVD system involves newline knowledge on basic physical chemical and engineering sciences newline newline
Pagination: xiv, 124p.
URI: http://hdl.handle.net/10603/29397
Appears in Departments:Faculty of Science and Humanities

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02_certificate.pdf5.65 kBAdobe PDFView/Open
03_abstract.pdf11 kBAdobe PDFView/Open
04_acknowledgement.pdf4.59 kBAdobe PDFView/Open
05_content.pdf22.75 kBAdobe PDFView/Open
06_chapter1.pdf494.98 kBAdobe PDFView/Open
07_chapter2.pdf44.94 kBAdobe PDFView/Open
08_chapter3.pdf430.37 kBAdobe PDFView/Open
09_chapter4.pdf1.21 MBAdobe PDFView/Open
10_chapter5.pdf221.22 kBAdobe PDFView/Open
11_chapter6.pdf881.18 kBAdobe PDFView/Open
12_chapter7.pdf10.34 kBAdobe PDFView/Open
13_references.pdf60.33 kBAdobe PDFView/Open
14_publication.pdf7.26 kBAdobe PDFView/Open
15_vitae.pdf5.38 kBAdobe PDFView/Open


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