Please use this identifier to cite or link to this item: http://hdl.handle.net/10603/160536
Title: Design and Analysis of Low Pressure MEMS Sensor
Researcher: Sindhanaiselvi D.
Guide(s): Ananda Natarajan, R.
Keywords: Pressure
MEMS
Membrane
Micro Sensor
University: Pondicherry University
Completed Date: 2015
Abstract: newline
Pagination: xxiv, 141p.
URI: http://hdl.handle.net/10603/160536
Appears in Departments:Pondicherry Engineering College

Files in This Item:
File Description SizeFormat 
01_title.pdfAttached File165.7 kBAdobe PDFView/Open
02_declaration.pdf151.05 kBAdobe PDFView/Open
03_certificate.pdf225.72 kBAdobe PDFView/Open
04_acknowledgement.pdf92 kBAdobe PDFView/Open
05_abstract.pdf92.93 kBAdobe PDFView/Open
06_table of contents.pdf105.3 kBAdobe PDFView/Open
07_list of tables.pdf175.75 kBAdobe PDFView/Open
08_list of figures.pdf178.56 kBAdobe PDFView/Open
09_list of abbreviations.pdf164.2 kBAdobe PDFView/Open
10_list of symbols.pdf165.8 kBAdobe PDFView/Open
11_chapter 1.pdf423.69 kBAdobe PDFView/Open
12_chapter 2.pdf345.03 kBAdobe PDFView/Open
13_chapter 3.pdf712.04 kBAdobe PDFView/Open
14_chapter 4.pdf920.49 kBAdobe PDFView/Open
15_chapter 5.pdf677.73 kBAdobe PDFView/Open
16_chapter 6.pdf682.27 kBAdobe PDFView/Open
17_chapter 7.pdf606.21 kBAdobe PDFView/Open
18_chapter 8.pdf199.78 kBAdobe PDFView/Open
19_references.pdf272.87 kBAdobe PDFView/Open
20_list of publications.pdf227.84 kBAdobe PDFView/Open


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